Effects of ion irradiation on silicon oxidation in electron cyclotron resonance argon and oxygen mixed plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373868
Reference31 articles.
1. Selective anodic oxidation of silicon in oxygen plasma
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4. Study of oxygen transport processes during plasma anodization of Si between room temperature and 600 °C
5. Low Temperature Oxidation of Silicon in a Microwave‐Discharged Oxygen Plasma
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