Plasma potential of a moving ionization zone in DC magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4974944
Reference67 articles.
1. Efficient Low Pressure Sputtering in a Large Inverted Magnetron Suitable for Film Synthesis
2. Reactive Sputter Deposition
3. Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
4. Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
5. High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
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