High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3692172
Reference16 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
2. Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion
3. Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films
4. Bifurcations of current transfer through a collisional sheath with ionization and self-organization on glow cathodes
5. F. F. Chen,Introduction to Plasma Physics(Plenum, New York, 1984), p. 199.
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