Kinetic analysis of C49‐TiSi2and C54‐TiSi2formation at rapid thermal annealing rates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352018
Reference10 articles.
1. Comparison of transformation to low-resistivity phase and agglomeration of TiSi/sub 2/ and CoSi/sub 2/
2. Nucleation, Transformation and Agglomeration of C54 Phase Titanium Disilicide
3. Metastable phase formation in titanium‐silicon thin films
4. Titanium disilicide formation on heavily doped silicon substrates
5. Kinetics of TiSi2formation by thin Ti films on Si
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