1. Joint Institute, University of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China
2. Shanghai Institute of IC Materials, 333 Huangqing Road, Jiading District, Shanghai 201800, China
3. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
4. Foshan (Southern China) Institute for New Materials, 92 Yanbu Suiyan West Road, Dali Town, Nanhai District, Foshan, Guangdong 528200, China