ENHANCED DIFFUSION OF HIGH‐TEMPERATURE ION‐IMPLANTED ANTIMONY INTO SILICON
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1653449
Reference11 articles.
1. Non-metallic solids. Vacancy enhanced diffusion in silicon. Effects of irradiation and of chemical impurities
2. Ion Bombardment of Silicon in a Glow Discharge
3. Radiation Enhanced Diffusion in Solids
4. RADIATION‐ENHANCED DIFFUSION OF BORON IN SILICON
5. DOPING OF SILICON BY ION IMPLANTATION
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