Effect of sapphire-substrate thickness on the curvature of thick GaN films grown by hydride vapor phase epitaxy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2817955
Reference18 articles.
1. Calculated stresses in multilayered heteroepitaxial structures
2. Relaxation Mechanism of Thermal Stresses in the Heterostructure of GaN Grown on Sapphire by Vapor Phase Epitaxy
3. Thermal stress in GaN epitaxial layers grown on sapphire substrates
4. Cracking of GaN films
5. Hydride vapor-phase epitaxial GaN thick films for quasi-substrate applications: Strain distribution and wafer bending
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2. InGaN-based visible light-emitting diodes on ScAlMgO4(0001) substrates;Applied Physics Express;2015-05-12
3. Effect of residual compressive stress on near-ultraviolet InGaN/GaN multi-quantum well light-emitting diodes;Optical Materials;2014-12
4. Stress Engineering by Controlling Sapphire Substrate Thickness in 520 nm GaN-Based Light-Emitting Diodes;Applied Physics Express;2013-12-01
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