A study of the oxidation of selected metal silicides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339383
Reference55 articles.
1. Thermal oxidation of hafnium silicide films on silicon
2. Thermal oxidation of the silicides CoSi2, CrSi2, NiSi2, PtSi, TiSi2 and ZrSi2
3. Oxidation of silicide thin films: TiSi2
4. Thermal oxidation of transition metal silicides
5. Oxidation of titanium disilicide on polycrystalline silicon
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