Optical‐emission‐spectroscopic studies of the sputtering of Y‐Ba‐Cu‐oxide thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342728
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1. Process-kinetics in facing targets sputtering of multi-component oxide thin films;Thin Solid Films;1999-06
2. Study of the processes occurring when sputtering YBa2Cu3O7 − x in pure oxygen;Vacuum;1998-03
3. Plasma optical emission studies of high-Tc superconducting and buffer thin film physical vapour deposition;Vacuum;1997-10
4. Studies of process parameter controlled composition variation in sputtered YBa2Cu3O7 − x films;Vacuum;1997-02
5. Optical absorption spectroscopic diagnostics during sputter deposition of Y‐Ba‐Cu‐oxide;Journal of Applied Physics;1992-11-15
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