Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123716
Reference10 articles.
1. Measurement of electron energy distribution in low-pressure RF discharges
2. Measured and simulated electron energy distribution functions in a low‐pressure radio frequency discharge in argon
3. Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges
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