Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge
Author:
Funder
Irish Research Council
Science Foundation Ireland
Intel Ireland
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/ab4c59/pdf
Reference50 articles.
1. Physics of Radio-Frequency Plasmas
2. Principles of Plasma Discharges and Materials Processing
3. Oxygen plasma etching for resist stripping and multilayer lithography
4. Radiofrequency plasma deposition of oxygen-containing films on polystyrene and poly(ethylene terephthalate) substrates improves endothelial cell growth
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