Electron heating mode transitions in dual frequency capacitive discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2402226
Reference9 articles.
1. Independent control of ion density and ion bombardment energy in a dual RF excitation plasma
2. Analytical model of a dual frequency capacitive sheath
3. Analytic model for a dual frequency capacitive discharge
4. Electrostatic modelling of dual frequency rf plasma discharges
5. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges
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