Author:
van Veenendaal E.,van Beurden P.,van Enckevort W. J. P.,Vlieg E.,van Suchtelen J.,Elwenspoek M.
Subject
General Physics and Astronomy
Reference29 articles.
1. Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration
2. M. Elwenspoek and H. V. Jansen,Silicon Micromachining(Cambridge University Press, Cambridge, U.K., 1999).
3. R. E. Oosterbroek, J. W. Berenschot, H. V. Jansen, A. J. Nijdam, G. Pandraud, M. C. Elwenspoek, and A. C. van den Berg, Proc. SPIE, 384 (1999).
4. On the relation between etch pits or growth hillocks and dislocations on the (111) faces of potassium aluminium alum
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