Extraction of molecular negative-ion beams of CN from radio frequency plasma-sputter-type heavy negative ion source for negative-ion beam deposition
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148628
Reference8 articles.
1. Negative‐ion production probability in rf plasma sputter‐type heavy negative‐ion sourcea)
2. Negative‐ion extraction of gaseous materials from a radio frequency plasma‐sputter‐type heavy negative‐ion source
3. Electron detachment cross-sections for heavy negative-ion beam
4. Negative-ion implantation technique
5. Prediction of New Low Compressibility Solids
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1. Negative Ion Plasmas;Encyclopedia of Plasma Technology;2016-12-12
2. Negative-ion source applications (invited);Review of Scientific Instruments;2008
3. Applications of heavy-negative-ion sources for materials science (invited);Review of Scientific Instruments;2000-02
4. Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors;Chemical Vapor Deposition;1999-12
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