Step-free GaN surfaces grown by confined-area metal-organic vapor phase epitaxy
Author:
Affiliation:
1. North Carolina State University, Raleigh, North Carolina 27607, USA
2. Sandia National Laboratories, Albuquerque, New Mexico 87185, USA
3. Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4993840
Reference24 articles.
1. Step-controlled epitaxial growth of SiC: High quality homoepitaxy
2. Surface kinetics in AlN growth: A universal model for the control of surface morphology in III-nitrides
3. The role of surface kinetics on composition and quality of AlGaN
4. Polar-on-nonpolar epitaxy
5. Smooth cubic commensurate oxides on gallium nitride
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