Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364382
Reference26 articles.
1. In-situ diagnostics for plasma surface processing
2. Doppler profile measurement of Ar and Ar+translational energies in a divergent magnetic field electron cyclotron resonance source
3. Ion dynamics of rf plasmas and plasma sheaths: A time‐resolved spectroscopic study
4. Nitrogen ion dynamics in low‐pressure nitrogen plasma and plasma sheath
5. Laser‐induced fluorescence measurements of transverse ion temperature in an electron cyclotron resonance plasma
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3. Temporally resolved ion velocity distribution measurements in a radio-frequency plasma sheath;Physics of Plasmas;2011-05
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5. Laser-induced fluorescence measurements in an inductively coupled plasma reactor;Applied Physics Letters;2007-10-15
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