In-situ diagnostics for plasma surface processing-Reference-Cited by-同舟云学术

In-situ diagnostics for plasma surface processing

Published:1993-06 Issue:6 Volume:56 Page:479-492
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Kroesen G. M. W.,Hoog F. J.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00331399.pdf

Reference61 articles.

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3. H.R. Griem: Spectral line broadening by plasmas (Academic, New York 1974)

4. V. Helbig: Proc. 11th European Sectional Conf. on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG), St. Petersburg, Russia, ed. by L. Tsendin, Europhysics Abstracts, Vol. 16F (1992) p. 20

5. H. Meuth, E. Sevillano: Microwave diagnostics, in Plasma Diagnostics, ed. by A. Auciello, D.L. Flamm, Vol. 1 (Academic, Boston 1989)

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