Author:
Schaepkens Marc,Oehrlein Gottlieb S.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference71 articles.
1. M. Schaepkens, Ph.D. Thesis, State University of New York at Albany, New York (1999).
2. National Research Council,Database Needs for Modeling and Simulation of Plasma Processing, National Academy Press, Washington, DC (1996).
3. Surface processes in low pressure plasmas
4. Surface science issues in plasma etching
5. Sidewall surface chemistry in directional etching processes
Cited by
102 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献