Electrical characterization of an ultrahigh concentration boron delta‐doping layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112215
Reference15 articles.
1. Delta doping in silicon
2. Growth and structural analysis of an ordered boron monolayer in Si(100)
3. Dopant electrical activity and majority-carrier mobility in B- and Sb-δ-doped Si thin films
4. Si(100)‐(2×1)boron reconstruction: Self‐limiting monolayer doping
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