Resistivity dominated by surface scattering in sub-50 nm Cu wires
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3292022
Reference20 articles.
1. Size-Dependent Resistivity in Nanoscale Interconnects
2. Electrical assessment of copper damascene interconnects down to sub-50 nm feature sizes
3. Analysis of the size effect in electroplated fine copper wires and a realistic assessment to model copper resistivity
4. Influence of phonon, geometry, impurity, and grain size on Copper line resistivity
5. The conductivity of thin metallic films according to the electron theory of metals
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