Author:
Steinlesberger G.,Engelhardt M.,Schindler G.,Steinhögl W.,von Glasow A.,Mosig K.,Bertagnolli E.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. The International Roadmap for Semiconductors, ITRS, 2001, http://public.itrs.net/
2. The conductivity of thin metallic films according to the electron theory of metals
3. The mean free path of electrons in metals
4. Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces
5. W. Steinhögl, M. Engelhardt, G. Schindler, G. Steinlesberger, Modelling the electrical resistivity of sub-50 nm copper wires, in: Proc. of the 3rd European Workshop on Ultimate Integration of Silicon, ULIS, Munich, Germany, 2002, p. 69.
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