Nanoscale capacitance microscopy of thin dielectric films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2957069
Reference16 articles.
1. Instrumentation for direct, low frequency scanning capacitance microscopy, and analysis of position dependent stray capacitance
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5. Dielectric-constant measurement of thin insulating films at low frequency by nanoscale capacitance microscopy
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