Author:
Kim Taek-Soo,Tsuji Naoto,Kemeling Nathan,Matsushita Kiyohiro,Chumakov Dmytro,Geisler Holm,Zschech Ehrenfried,Dauskardt Reinhold H.
Subject
General Physics and Astronomy
Reference34 articles.
1. Fracture of nanoporous thin-film glasses
2. E. P. Guyer and R. H. Dauskardt, Proceedings of the 2003 IEEE International Interconnect Technology Conference, 2003.
3. Accelerated crack growth of nanoporous low-k glasses in CMP slurry environments
4. E. P. Guyer and R. H. Dauskardt, “Effects of Porosity on Reducing Cohesive Strength and Accelerating Crack Growth in Ultra Low-k Thin-Films,” Proceedings of the 2005 IEEE International Interconnect Technology Conference, 2005.
5. The Effect of Plasma Cure Temperature on Spin‐On Glass
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献