Formation of pnp bipolar structure by thermal donors in nitrogen-containing p-type Czochralski silicon wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1494466
Reference18 articles.
1. Site Symmetry and Ground-State Characteristics for the Oxygen Donor in Silicon
2. Oxygen complexes in silicon
3. Electronic device fabrication by simple hydrogen enhanced thermal donor formation processes in p-type Cz-silicon
4. Effect of back‐surface polycrystalline silicon layer on oxygen precipitation in Czochralski silicon wafers
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