Growth and electrical properties of spin coated ultrathin ZrO2 films on silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4812733
Reference26 articles.
1. Improved electrical properties of PbZrTiO3/BiFeO3 multilayers with ZnO buffer layer
2. An overview of zirconia ceramics: Basic properties and clinical applications
3. Design and processing of porous materials for electronic applications
4. Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric application
Cited by 33 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Highly active BiFeO3–g-C3N4 S-scheme heterojunction with improved antibiotic degradation under visible-light: revealing mechanism;Research on Chemical Intermediates;2024-07-01
2. Flexible metal oxide thin-film transistors produced by a nanofiber-to-film process;Journal of Materials Chemistry C;2024
3. Interface tuning and electrical property optimization of La-doped ZrO2 gate dielectric based on solution driving;Vacuum;2023-11
4. Thermal conductivity of yttria‐stabilized zirconia thin films grown by plasma‐enhanced atomic layer deposition;Journal of the American Ceramic Society;2023-05-15
5. Effect of Heat Treatment on Zirconium Oxide High‐k Gate Dielectric in Silicon‐Based Metal Oxide Semiconductor Capacitors;physica status solidi (a);2023-03-23
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3