Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference45 articles.
1. Substrate temperature influenced ZrO2 films for MOS devices;Kondaiah;Surf. Interface Anal.,2020
2. Effects of boron incorporation on the structural, optical and electrical properties of sol–gel-derived ZrO2 gate dielectrics;Xiao;J. Alloys Compd.,2015
3. Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high-k HfAlOx gate dielectrics;Jin;Ceram. Int.,2017
4. Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature;Liang;J. Alloys Compd.,2018
5. Room-temperature UV-ozone assisted solution process for zirconium oxide films with high dielectric properties;Dong;Ceram. Int.,2017
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献