Dependence of thin‐film microstructure on deposition rate by means of a computer simulation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335885
Reference7 articles.
1. Effect of vapour incidence angles on profile and properties of condensed films
2. Simulation of structural anisotropy and void formation in amorphous thin films
3. Columnar microstructure in vapor-deposited thin films
4. Computer simulation of amorphous thin films of hard spheres
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