Temperature influence on the damage induced in Si+‐implanted InP
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.349631
Reference12 articles.
1. Epitaxial regrowth of (100) InP layers amorphized by ion implantation at room temperature
2. Low‐temperature epitaxial regrowth of ion‐implanted amorphous GaAs
3. Damage annealing behavior of Se implanted GaAs
4. Implantation and Annealing Behavior of Group III and V Dopants in Silicon as Studied by the Channeling Technique
5. TEM structural studies on Se+implanted GaAs
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