Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2976299
Reference20 articles.
1. Simulation Study on Image Contrast and Spatial Resolution in Helium Ion Microscope
2. An Introduction to the Helium Ion Microscope
3. Focused Ion Beam Systems
4. High Resolution Focused Ion Beams: FIB and its Applications
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