Effect of substrate roughness on c-oriented AlN thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3068309
Reference13 articles.
1. Preparation ofc-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering
2. Stress dependence of reactively sputtered aluminum nitride thin films on sputtering parameters
3. Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
4. Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition
5. Development of preferred orientation in polycrystalline AlN thin films deposited by rf sputtering system at low temperature
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