Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105903
Reference7 articles.
1. Very efficient plasma generation by whistler waves near the lower hybrid frequency
2. Emission cross sections of Hα and CH(A2Δ→X2Π) radiations for electron impact on hydrocarbons
3. Measurement of Film Thickness Using Infrared Interference
4. Dissociation of methane by electron impact
5. Radiolysis of Methane in a Wide‐Range Radiolysis Source of a Mass Spectrometer. I. Individual and Total Cross Sections for the Production of Positive Ions, Negative Ions, and Free Radicals by Electrons
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