Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.450933
Reference19 articles.
1. The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane
2. Silane pyrolysis
3. The pyrolysis of monosilane
4. Kinetics and mechanism of the silane decomposition
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