Selective epitaxial growth of stepwise SiGe:B at the recessed sources and drains: A growth kinetics and strain distribution study

Author:

Koo Sangmo1,Jang Hyunchul1,Kim Sun-Wook1,Ko Dae-Hong1

Affiliation:

1. Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea

Funder

Ministry of Trade, Industry and Energy (MOTIE)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference40 articles.

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2. A 90-nm Logic Technology Featuring Strained-Silicon

3. Strain Engineered SiGe Multiple-Quantum-Well Nanomembranes for Far-Infrared Intersubband Device Applications

4. P. Hashemi, K. Balakrishnan, A. Majumdar, A. Khakifirooz, W. Kim, A. Baraskar, L. A. Yang, K. Chan, S. U. Engelmann, J. A. Ott, D. A. Antoniadis, E. Leobandung, and D.G. Park, in VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on, Honolulu, USA, 9-12 June 2014 (IEEE 2014), pp. 1–2.

5. Enhancement of a Channel Strain via Dry Oxidation of Recessed Source/Drain Si1−xGex Structures

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