Observations on the phase transformation and its effect on the resistivity of WSi2films prepared by low‐pressure chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335192
Reference5 articles.
1. The formation of silicides in Mo-W Bilayer films on si substrates: A marker experiment
2. Observations on the hexagonal form of MoSi2and WSi2films produced by ion implantation and on related snowplow effects
3. Hexagonal WSi2in cosputtered (tungsten and silicon) mixture
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Functionalized Emulsion and Suspension Polymer Particles: Nanoreactors for the Synthesis of Inorganic Materials;Chemistry of Materials;1998-10-01
2. Deposition ofWSixFilms from Preactivated Mixture ofWF6/SiH4;Japanese Journal of Applied Physics;1994-01-15
3. Reactions with Silicon;W Tungsten;1993
4. Insitustress measurement of chemical vapor deposited tungsten silicides;Applied Physics Letters;1991-04
5. References;Thin Films by Chemical Vapour Deposition;1990
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