Observations on the hexagonal form of MoSi2and WSi2films produced by ion implantation and on related snowplow effects
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.327517
Reference10 articles.
1. Ion‐beam‐induced silicide formation
2. Niobium silicide formation induced by Ar‐ion bombardment
3. Refractory metal silicide formation induced by As+implantation
4. Inert‐gas‐bubble formation in the implanted metal/Si system
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