Electrical and spectral characterization of an atmospheric pressure He/CF4 plasma jet
Author:
Affiliation:
1. State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
Funder
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5030781
Reference44 articles.
1. Plasma diagnostics and processings in CF4/He radio frequency discharge
2. Etching characteristics of Si using surface discharge plasma under Ar/CF 4 and He/CF 4 conditions
3. The GEM scintillation in He–CF4, Ar–CF4, Ar–TEA and Xe–TEA mixtures
4. Characterization of a GEM-based scintillation detector with He–CF4gas mixture in clinical proton beams
5. Photoelectron extraction efficiency from a CsI photocathode and THGEM operation in He−CF4and He−CH4mixtures
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