Surface radicals in silane/hydrogen discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3050331
Reference33 articles.
1. Critical review of amorphous and microcrystalline silicon materials and solar cells: Special issue in honor of Stanford R. Ovshinsky
2. Model for Columnar Microstructure of Thin Solid Films
3. Growth of hydrogenated amorphous silicon due to controlled ion bombardment from a pure silane plasma
4. Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges
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