Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges-Reference-Cited by-同舟云学术

Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges

Published:1993-01 Issue:1 Volume:64 Page:31-44
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Böhm Christian,Perrin Jérôme

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1144398

Reference52 articles.

1. Design of Retarding Field Energy Analyzers

2. Resolution and Sensitivity Considerations of an Auger Electron Spectrometer Based on Display LEED Optics

3. Energy Dispersion of Positive Ions Effused from an RF Plasma

4. An Apparatus for Electron Energy Analysis in Glow Discharge Plasmas

5. Interpretation of electrostatic energy analyzer data of a flowing plamsa

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