Ion dynamics model for collisionless radio frequency sheaths
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.372966
Reference9 articles.
1. A semianalytic radio frequency sheath model integrated into a two-dimensional hybrid model for plasma processing reactors
2. Ion energy distributions in rf sheaths; review, analysis and simulation
3. Analytical solution for capacitive RF sheath
4. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
5. Application of the physics of plasma sheaths to the modeling of rf plasma reactors
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