Formation of the radio frequency sheath of plasma with Cairns–Tsallis electron velocity distribution
Author:
Affiliation:
1. Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China
2. Center for Magnetic Fusion Theory, Chinese Academy of Sciences, Hefei 230031, China
Funder
National Key R&D Program of China
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0015346
Reference42 articles.
1. Radio frequency sheaths in an oblique magnetic field
2. Characteristics of a plasma sheath in a radio frequency biased voltage
3. Effects of electron inertia in capacitively coupled radio frequency discharges
4. Bohm Criterion for Collisionless Sheaths in Two-Ion-Species Plasmas
5. Theory of the rf sheath in the regime between the ion and electron plasma frequencies
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