Low-frequency noise and defects in copper and ruthenium resistors-Reference-Cited by-同舟云学术

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Low-frequency noise and defects in copper and ruthenium resistors

Published:2019-05-20 Issue:20 Volume:114 Page:203501
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Fleetwood D. M.¹^ORCID,Beyne S.²³^ORCID,Jiang R.¹^ORCID,Zhao S. E.¹^ORCID,Wang P.¹^ORCID,Bonaldo S.⁴^ORCID,McCurdy M. W.¹^ORCID,Tőkei Zs.³,DeWolf I.²³^ORCID,Croes Kristof³,Zhang E. X.¹^ORCID,Alles M. L.¹,Schrimpf R. D.¹^ORCID,Reed R. A.¹,Linten D.³^ORCID

Affiliation:

1. Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, Tennessee 37235, USA

2. MTM, KU Leuven, Kasteelpark Arenberg 44 bus 2450, B-3001 Leuven, Belgium

3. imec, Kapeldreef 75, B-3001 Leuven, Belgium

4. Department of Information Engineering, University of Padua, 35131 Padua, Italy

Funder

Defense Threat Reduction Agency

Air Force Office of Scientific Research

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5093549

Reference52 articles.

1. Technology and reliability constrained future copper interconnects. I. Resistance modeling

2. Technology and reliability constrained future copper interconnects. II. Performance implications

3. Strategies to Ensure Electromigration Reliability of Cu/Low-k Interconnects at 10 nm

4. Thickness dependence of the resistivity of platinum-group metal thin films

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1. Measurements of low-frequency noise for testing the reliability of VLSI interconnects of mixed geometry;AIP Conference Proceedings;2024

2. Random telegraph noise in nanometer-scale CMOS transistors exposed to ionizing radiation;Applied Physics Letters;2023-04-24

3. Low-frequency noise in nanowires;Nanoscale;2023

4. A review of design approaches for the implementation of low-frequency noise measurement systems;Review of Scientific Instruments;2022-11-01

5. Excess noise in high-current diamond diodes;Applied Physics Letters;2022-02-07

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