Kinetic model for plasma-based ion implantation of a short, cylindrical tube with auxiliary electrode
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121188
Reference11 articles.
1. Ion‐matrix sheath in a cylindrical bore
2. Pulsed sheath dynamics in a small cylindrical bore
3. Analytic solution for plasma dynamics in a small, pulsed bore
4. Analytic theory of sheath expansion into a cylindrical bore
5. A model of plasma source ion implantation for inner surface modification
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