Pulsed sheath dynamics in a small cylindrical bore
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.870881
Reference9 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes
3. Model of plasma immersion ion implantation for voltage pulses with finite rise and fall times
4. Model of plasma source ion implantation in planar, cylindrical, and spherical geometries
5. Model of plasma immersion ion implantation
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