Experiments on plasma immersion ion implantation inside conducting tubes embedded in an external magnetic field
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference28 articles.
1. Plasma source ion-implantation technique for surface modification of materials;Conrad;J. Appl. Phys.,1987
2. Handbook of Plasma Immersion Ion Implantation and Deposition;Anders,2000
3. Model of plasma immersion ion implantation;Lieberman;J. Appl. Phys.,1989
4. Ion-matrix sheath in a cylindrical bore;Sheridan;J. Appl. Phys.,1993
5. Analytic theory of sheath expansion into a cylindrical bore;Sheridan;Phys. Plasmas.,1996
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4. New possibilities of plasma immersion ion implantation (PIII) and deposition (PIII&D) in industrial components using metal tube fixtures;Surface and Coatings Technology;2017-02
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