Silicon temperature measurement by infrared transmission for rapid thermal processing applications
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102592
Reference3 articles.
1. Spectral Emissivity of Silicon
2. The Standard Thermodynamic Functions for the Formation of Electrons and Holes in Ge, Si, GaAs , and GaP
3. The temperature-dependence of the refractive index of silicon
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