1. Rapid thermal processing systems: a review with emphasis on temperature control;Roozeboom;J. Vac. Sci. Technol.,1990
2. Review of temperature measurements in the semiconductor industry;Anderson,1992
3. The challenges of temperature measurement in the semiconductor industry;Adams,1992
4. Recent developments in rapid thermal processing;Fiory;J. Electron. Mater.,2002
5. Radiation Thermometry in the Semiconductor Industry, in: Radiometric Temperature Measurements II;Adams,2010