1. State Key Laboratory of Silicon and Advanced Semiconductor Materials and School of Materials Science and Engineering, Zhejiang University 1 , Hangzhou 310027, China
2. Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University 2 , Hangzhou, Zhejiang 311200, China
3. Hangzhou Garen Semiconductor Company Limited 3 , Hangzhou, Zhejiang 311200, China