Analysis of residual stress in diamond films by x-ray diffraction and micro-Raman spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1431431
Reference25 articles.
1. Hot filament scaling-up for CVD diamond burr manufacturing
2. Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements
3. Intrinsic stress in diamond films prepared by microwave plasma CVD
4. Crystalline quality and residual stresses in diamond layers by Raman and x‐ray diffraction analyses
5. Characterisation of CVD grown diamond and its residual stress state
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