Synthesis and characterization of SiC:H ultrafine powder generated in an argon–silane–methane low-pressure radio-frequency discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367510
Reference23 articles.
1. In situ laser diagnostic studies of plasma‐generated particulate contamination
2. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
3. Transition from a capacitive to a resistive regime in a silane radio frequency discharge and its possible relation to powder formation
4. Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration
5. Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experiments
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