Nanocavities in He implanted InP
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1618354
Reference24 articles.
1. Gettering of metals by voids in silicon
2. Interaction of copper with cavities in silicon
3. Overpressurized bubbles versus voids formed in helium implanted and annealed silicon
4. Helium and Hydrogen Induced Growth of Microcavities in Silicon; Application to Gas And Impurity Collection
5. Helium desorption/permeation from bubbles in silicon: A novel method of void production
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2. Metal Ions Implantation‐Induced Effects in GaN Thin Films;Ion Implantation - Research and Application;2017-06-14
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